WEX Medical
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This Three targets RF magnetron sputtering coater is a cost-effective, standardized, and modular coating equipment. It features 1-inch or 2-inch magnetron targets, allowing users to choose based on substrate size. Equipped with three 300W RF power supplies, it is ideal for non-metal preparation and multi-layer coating requirements.
The system integrates two-channel high-precision mass flowmeters (customizable up to four channels) and advanced turbomolecular pump sets reaching an ultimate vacuum of 1.0E-5Pa. Multiple solenoid valves control the gas path, allowing sample retrieval without shutting down the pump, significantly improving efficiency.
| Category | Specifications | Detail/Accuracy | |
|---|---|---|---|
| Sample Stage | Size | φ185mm | Accuracy: ±1ºC |
| Heating/Rotation | Max 500ºC | 1-20rpm adjustable | |
| Target Head | Quantity | 3 Targets (2" standard) | 1" or 2" optional |
| Cooling | Water Cooling | Flow rate: 10L/min | |
| Vacuum Chamber | Dimensions | φ300mm × 300mm | Stainless steel material |
| Window/Open | φ100mm Window | Top cover open mode | |
| Vacuum System | Ultimate Vacuum | 1.0E-5Pa | 600L/S Molecular pump |
| Power | Configuration | RF Power Supply × 3 | Max Output: 300W |
| General | Overall Size | 600 × 650 × 1280mm | Total Weight: 300kg |
